System and apparatus for reducing arcing and localized heating d

Details System and apparatus for reducing arcing and localized heating d System and apparatus for reducing arcing and localized heating d

1997-08-07

1998-12-01

Leung, Philip H.

Electric heating

Microwave heating

Load support

219679, 219736, 361816, 206710, H05B 680

Patent

active

058442162

ABSTRACT:
An apparatus for reducing arcing and localized heating as a result of applying microwave energy to a microelectronic substrate having electronic components thereon is provided. A microwave furnace having a chamber is configured to secure a microelectronic substrate therewithin. The microelectronic substrate is electrically interconnected with a ground connected to an interior wall of the microwave furnace. A holder for securing a microelectronic substrate during the application of microwave energy and for providing the necessary electrical connections for grounding components and circuitry thereon is also provided. The holder may have a heat sink for protection against heat build-up and for maintaining a microelectronic substrate in a substantially flat orientation during microwave processing.

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