Electric heating – Microwave heating – Radiation protection
Patent
1995-06-30
1998-05-12
Leung, Philip H.
Electric heating
Microwave heating
Radiation protection
219756, 219759, 219762, 219679, 361220, 361816, 174 35R, 206710, H05B 680
Patent
active
057509689
ABSTRACT:
A system and apparatus for reducing arcing and localized heating as a result of applying microwave energy to a microelectronic substrate having electronic components thereon is provided. A microwave furnace having a chamber is configured to secure a microelectronic substrate therewithin. The microelectronic substrate is electrically interconnected with a ground connected to an interior wall of the microwave furnace. A holder for securing a microelectronic substrate during the application of microwave energy and for providing the necessary electrical connections for grounding components and circuitry thereon is also provided. The holder may have a heat sink for protection against heat build-up and for maintaining a microelectronic substrate in a substantially flat orientation during microwave processing.
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Fathi Zakaryae
Gerard Richard S.
Wei Jianghua
Lambda Technologies Inc.
Leung Philip H.
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