Synthetic silica having low polarization-induced...

Details Synthetic silica having low polarization-induced... Synthetic silica having low polarization-induced...

2011-03-15

2011-03-15

Brunsman, David M. (Department: 1732)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

Reexamination Certificate

active

07906446

ABSTRACT:
Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 μJ·cm−2·pulse−1and a pulse length of about 25 ns for 5×109pulses.

REFERENCES:
patent: 5086352 (1992-02-01), Yamagata et al.
patent: 5325230 (1994-06-01), Yamagata et al.
patent: 5364433 (1994-11-01), Nishimura et al.
patent: 5410428 (1995-04-01), Yamagata et al.
patent: 5616159 (1997-04-01), Araujo et al.
patent: 6143676 (2000-11-01), Ohashi et al.
patent: 6451719 (2002-09-01), Yamagata
patent: 6576578 (2003-06-01), Ikuta et al.
patent: 7534733 (2009-05-01), Bookbinder et al.
patent: 2002/0077244 (2002-06-01), Borrelli et al.
patent: 2003/0051507 (2003-03-01), Ikuta et al.
patent: 2003/0115905 (2003-06-01), Kuhn et al.
patent: 2003/0195107 (2003-10-01), Ikuta et al.
patent: 2005/0217318 (2005-10-01), Kuhn et al.
patent: 1340722 (2003-03-01), None
patent: WO 0229492 (2002-04-01), None
patent: WO2005082800 (2005-11-01), None
Escher, G. C.,KrF Laser Induced Color Centers in Commercial Fused Silicas, SPIE vol. 998, Excimer Beam Applications, pp. 30-37 (1988).
Yamagata, S.,Improvement of Excimer Laser Durability of Silica Glass, Transactions of the Materials Research Society of Japan, vol. 8, pp. 82-96 (1992).
Faile, S. P., and Roy, D. M.,Mechanism of Color Center Destruction in Hydrogen Impregnated Radiation Resistant Glasses, Materials Research Bull., vol. 5, pp. 385-390 (1970).
Shelby, J. E.,Radiation Effects in Hydrogen-impregnated Vitreous Silica, J. Applied Physics, vol. 50, No. 5, pp. 3702-3706 (1979).
C.K. Van Peski et al. reports in Journal of Non-Crystalline Solids 265, 285 (2000).
N.F. Borrelli et al., Applied Physics Letters 80 (2), 219 (2002).

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