Synthetic silica glass formed article for optical use

Details Synthetic silica glass formed article for optical use Synthetic silica glass formed article for optical use

1995-03-01

1998-08-04

Sugarman, Scott J.

Optical: systems and elements

Lens

Spherical

359652, G02B 300

Patent

active

057903158

ABSTRACT:
A high purity ball-shaped optical article formed of silica glass useful in optical systems employed in photolithography applications. The optical article is characterized by end faces and a side face positioned between the end faces. The side face is externally projected beyond the outline of the end faces and has a spherical configuration. The optical article is uniquely characterized by a smaller number of cords per unit area, viewed in a direction perpendicular to a line connecting the end faces, than the number of cords per unit area viewed in a direction along the line connecting the end faces. The article is also defined by optical homogeneity in a direction perpendicular to the line connecting the end faces.

REFERENCES:
patent: 2904713 (1959-09-01), Heraeus et al.
patent: 3485613 (1969-12-01), Herczog et al.
patent: 4268112 (1981-05-01), Peterson
patent: 5086352 (1992-02-01), Yamagata et al.

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