Synthetic quartz glass substrate for excimer lasers and...

Details Synthetic quartz glass substrate for excimer lasers and... Synthetic quartz glass substrate for excimer lasers and...

2007-09-06

2010-11-09

Group, Karl E (Department: 1793)

Glass manufacturing

Processes

Reshaping or surface deformation of glass preform

C065S117000, C065S414000, C065S064000, C501S054000

Reexamination Certificate

active

07827824

ABSTRACT:
A synthetic quartz glass substrate having (i) an OH concentration of 1-100 ppm and a hydrogen molecule concentration of 1×1016-1×1019molecules/cm3, (ii) an in-plane variation of its internal transmission at wavelength 193.4 nm which is up to 0.2%, and (iii) an internal transmission of at least 99.6% at wavelength 193.4 nm is suited for use with excimer lasers.

REFERENCES:
patent: 5330941 (1994-07-01), Yaba et al.
patent: 6451719 (2002-09-01), Yamagata
patent: 6480518 (2002-11-01), Fujinoki et al.
patent: 6499317 (2002-12-01), Ikuta et al.
patent: 6541405 (2003-04-01), Otsuka et al.
patent: 2003/0027705 (2003-02-01), Nishimura et al.
patent: 2003/0051507 (2003-03-01), Ikuta et al.
patent: 2003/0195107 (2003-10-01), Ikuta et al.
patent: 2006/0137397 (2006-06-01), Bookbinder et al.
patent: 2006/0183622 (2006-08-01), Nishimura et al.
patent: 2007/0027018 (2007-02-01), Ogawa et al.
patent: 10 2005 062 916 (2006-07-01), None
patent: 1 061 052 (2000-12-01), None
patent: 1 340 722 (2003-09-01), None
patent: 1-212247 (1989-08-01), None
patent: 7-43891 (1995-01-01), None
patent: 7-61823 (1995-03-01), None
patent: 2762188 (1998-03-01), None

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