Glass manufacturing – Processes – Forming product or preform from molten glass
Reexamination Certificate
2011-06-07
2011-06-07
Nguyen, Khanh (Department: 1746)
Glass manufacturing
Processes
Forming product or preform from molten glass
C065S093000, C065S104000, C065S111000, C065S112000, C065S114000, C065S414000, C065S117000
Reexamination Certificate
active
07954340
ABSTRACT:
When a synthetic quartz glass substrate is prepared from a synthetic quartz glass block, (I) the block has a hydrogen molecule concentration of 5×1017-1×1019molecules/cm3, (II) the substrate has a hydrogen molecule concentration of 5×1015-5×1017molecules/cm3, (III) the substrate has an in-plane variation of its internal transmittance at 193.4 nm which is up to 0.2%, and (IV) the substrate has an internal transmittance of at least 99.6% at 193.4 nm. The synthetic quartz glass substrate has a high transmittance and a uniform transmittance distribution, and is adapted for use with excimer lasers, particularly ArF excimer lasers.
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Khotimchenko et al., Zhumal Prinklandnoi Spektroskipii, pp. 987-991, vol. 46, No. 6.
Otsuka Hisatoshi
Sekizawa Osamu
Shirota Kazuo
Aziz Keith T
Birch & Stewart Kolasch & Birch, LLP
Nguyen Khanh
Shin-Etsu Chemical Co. , Ltd.
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