Synthetic quartz glass for optical member, projection...

Details Synthetic quartz glass for optical member, projection... Synthetic quartz glass for optical member, projection...

2008-05-06

2008-05-06

Green, Anthony J. (Department: 1793)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S053000

Reexamination Certificate

active

07368403

ABSTRACT:
A synthetic quartz glass for an optical member, which is to be used in an optical device employing an ArF excimer laser beam as a light source at an energy density of at most 2 mJ/cm2/pulse or in an optical device employing a KrF excimer laser beam as a light source at an energy density of at most 30 mJ/cm2/pulse, characterized in that the hydrogen molecule concentration is within a range of at least 1×1016molecules/cm3and less than 5×1016molecules/cm3.

REFERENCES:
patent: 5677754 (1997-10-01), Makinouchi
patent: 6499317 (2002-12-01), Ikuta et al.
patent: 6656860 (2003-12-01), Yoshida et al.
patent: 7082790 (2006-08-01), Kuhn et al.
patent: 2005/0068644 (2005-03-01), Ikuta et al.
patent: 2006/0183623 (2006-08-01), Ikuta et al.
patent: 1 094 040 (2001-04-01), None
patent: 1 103 528 (2001-05-01), None
patent: 1 125 897 (2001-08-01), None
patent: 6-199539 (1994-07-01), None
patent: 9-52723 (1997-02-01), None
patent: 9-235134 (1997-09-01), None
patent: 2001-110710 (2001-04-01), None
patent: WO 01/92175 (2001-12-01), None
patent: WO 02/21217 (2002-03-01), None
Patent Abstracts of Japan, JP 09-235134, Sep. 9, 1997 (reference previously filed in Japanese language on Oct. 22, 2004).
Patent Abstracts of Japan, JP 09-052723, Feb. 25, 1997 (reference previously filed in Japanese language on Oct. 22, 2004).
Patent Abstracts of Japan, JP 06-199539, Jul. 19, 1994 (reference previously filed in Japanese language on Oct. 22, 2004).
Patent Abstracts of Japan, JP 2000-239040, Sep. 5, 2000.

Affiliated with

Also associated with

Rating

Synthetic quartz glass for optical member, projection... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Synthetic quartz glass for optical member, projection..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Synthetic quartz glass for optical member, projection... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2801081