Radiant energy – Ion generation – Field ionization type
Patent
1983-04-19
1985-10-22
Anderson, Bruce C.
Radiant energy
Ion generation
Field ionization type
250427, 31511181, H01J 2700
Patent
active
045490821
ABSTRACT:
An improved crossed-beam charge-exchange ion gun in which a synthetic plasma is formed by injecting an electron beam into a collimated molecular beam just before the molecules are ionized by charge exchange with a crossed primary ion beam, thereby forming a secondary ion beam from the ionized but space-charge-neutralized and substantially undeflected molecular beam. The plasma thus formed extends to an aperture stop in an aperture tube which extends upstream from an anode downstream of which anode a cathode is placed. A field is formed within the cathode/anode space and within the aperture tube into which the plasma extends. The sheath edge of the plasma within the tube is curved by the field to form a meniscus, and the aperture, being smaller in area than the secondary ion beam upstream of the aperture, both collimates the secondary ion beam and acts as a lens stop for the subsequent immersion lens formed by the meniscus and the field region.
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