Chemistry of inorganic compounds – Oxygen or compound thereof – Metal containing
Reexamination Certificate
2007-04-03
2007-04-03
Vanoy, Timothy C. (Department: 1754)
Chemistry of inorganic compounds
Oxygen or compound thereof
Metal containing
C423S623000, C977S762000, C977S755000, C977S811000
Reexamination Certificate
active
10629796
ABSTRACT:
Disclosed are a method of fabricating ZnO nanostructures and its apparatus, and more particularly, to a method of fabricating ZnO nanostructures from Zn gas, which is produced by a reduction process between ZnO powder and graphite, on a silicon substrate, wherein various types of nanostructures are reproducibly generated by adjusting the processing temperature and the mixed ratio between oxygen and argon gases, which are introduced into the interior of a reaction tube as carrier gases, and its apparatus.
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Xia et al.; “One-Dimensional Nanostructures: Synthesis, Characterization, and Applications”; Advanced Materials, vol. 15, No. 5, pp. 353-389, (2003).
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Choi Heon-Jin
Park Jae-Gwan
Park Jae-Hwan
Finnegan Henderson Garrett & Dunner LLP
Korea Institute of Science and Technology
Vanoy Timothy C.
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