Synthesis of ZnO nano-structured materials and its apparatus

Chemistry of inorganic compounds – Oxygen or compound thereof – Metal containing

Reexamination Certificate

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C423S623000, C977S762000, C977S755000, C977S811000

Reexamination Certificate

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10629796

ABSTRACT:
Disclosed are a method of fabricating ZnO nanostructures and its apparatus, and more particularly, to a method of fabricating ZnO nanostructures from Zn gas, which is produced by a reduction process between ZnO powder and graphite, on a silicon substrate, wherein various types of nanostructures are reproducibly generated by adjusting the processing temperature and the mixed ratio between oxygen and argon gases, which are introduced into the interior of a reaction tube as carrier gases, and its apparatus.

REFERENCES:
patent: 6710091 (2004-03-01), Womelsdorf et al.
patent: 2005/0214190 (2005-09-01), Hyeon et al.
patent: 2005/0249660 (2005-11-01), Liao et al.
Xia et al.; “One-Dimensional Nanostructures: Synthesis, Characterization, and Applications”; Advanced Materials, vol. 15, No. 5, pp. 353-389, (2003).
Tseng et al.; “Towards Nanocomputers”; Science, vol. 294: pp. 1293-1294, (2001).
Huang et al.; “Catalytic Growth of Zinc Oxide Nanowires”; Advanced Materials, vol. 13, No. 2, pp. 113-116, (2001).

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