Coating processes – Electrical product produced – Transparent base
Patent
1991-10-25
1993-04-13
Bell, Janyce
Coating processes
Electrical product produced
Transparent base
4271261, 4271262, 427226, 427240, 427343, 427377, 427380, B05D 512, B05D 312, B05D 302
Patent
active
052021521
ABSTRACT:
A substantially stoichiometric film of titanium nitride is provided by heating a substrate upon which a solution containing titanium has been applied at a substantially ambient temperature to provide a gel-film containing titanium on the surface of the substrate in an ammonia atmosphere. The substrate is heated to a temperature at which the titanium in the titanium-containing gel-film is substantially completely transformed to a substantially stoichiometric titanium nitride film, and at a rate of temperature change that is great enough to prevent the formation of nonstoichiometric titanium nitride compounds or other undesired titanium compounds in the resulting titanium nitride film. The invention is particularly suited for use in microelectronic devices.
REFERENCES:
patent: 3036888 (1962-05-01), Lowe
patent: 4151325 (1979-04-01), Welch
patent: 4361598 (1982-11-01), Yoldas
patent: 4535000 (1985-08-01), Gordon
patent: 4675073 (1987-06-01), Douglas
patent: 4704299 (1987-11-01), Wielonski et al.
patent: 4812333 (1989-05-01), Micheli
patent: 4830879 (1989-05-01), Debsikdar
patent: 4842888 (1989-06-01), Halluska et al.
patent: 4885188 (1989-12-01), Hawegawa et al.
patent: 4906493 (1990-05-01), Laine
patent: 4948762 (1990-08-01), Krumbe et al.
patent: 4966812 (1990-10-01), Ashley et al.
patent: 4970095 (1990-11-01), Bolt et al.
"Nitridation of the Sol-Gel-Derived Titanium Oxide Films by Heating in Ammonia Gas"; Kanichi Kamiya and Tomoaki Nishijima; J. Am Ceram. Soc., 73 [9] 2750-52 (1990).
"Preparation of Titanium Nitride and Titanium Carbonitride by the Preceramic Polymer Route"; Dietmar Seyferth and Gerard Mignani; Journal of Materials Science Letters 7 (1988) 487-488.
"Nitriding of Bulk Titanium and Thin Titanium Films in a NH.sub.3 Low Pressure Plasma"; N. Laidani, et al.; Applied Surface Science, vol. 36, No. 1-4, pp. 520-529, Jan. 1989.
Giannelis Emmanuel P.
Keddie Joseph L.
Shacham-Diamond Y. Y.
Bell Janyce
Cornell Research Foundation Inc.
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