Synthesis of silicon nitride

Details Synthesis of silicon nitride Synthesis of silicon nitride

1982-03-29

1983-08-16

Cooper, Jack

Chemistry of inorganic compounds

Silicon or compound thereof

Binary compound

423406, 501 97, C01B 21068

Patent

active

043991157

ABSTRACT:
A process for synthesizing silicon nitride by reacting a silicon halide and ammonia at a high temperature, which is characterized in that at least while the reaction product is amorphous, hydrogen and chlorine are burned in the reaction zone where a halogen containing inorganic silicon compound and ammonia are reacting, and the reaction of said reactants is effected by the heat of combustion thus obtained.

REFERENCES:
patent: 3352637 (1967-11-01), Heymer et al.
patent: 3726643 (1973-04-01), Merzhanov et al.
patent: 4145224 (1979-03-01), Mehalchick et al.
patent: 4289801 (1981-09-01), Galasso et al.
patent: 4346068 (1982-08-01), Kasai et al.

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