Synthesis of semiconductor grade tungsten hexafluoride

Details Synthesis of semiconductor grade tungsten hexafluoride Synthesis of semiconductor grade tungsten hexafluoride

1990-02-07

1994-09-20

Niebling, John

Chemistry of inorganic compounds

Halogen or compound thereof

Binary fluorine containing compound

423606, C01G 4104, C01G 4102

Patent

active

053487230

ABSTRACT:
Semiconductor grade tungsten hexafluoride (WF.sub.6) is produced by reacting tungsten metal with a recirculating flow of gaseous WF.sub.6 containing a small concentration of fluorine in a heated reactor. The high purity WF.sub.6 produced is useful for deposition of tungsten metallization in fabricating VLSI integrated circuitry.

REFERENCES:
patent: 3995011 (1976-11-01), Jache et al.
patent: 4080420 (1978-03-01), Kasserra et al.
patent: 4803062 (1989-02-01), Munn et al.

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