Synthesis of semiconductor grade tungsten hexafluoride

Details Synthesis of semiconductor grade tungsten hexafluoride Synthesis of semiconductor grade tungsten hexafluoride

1990-05-24

1994-07-12

McMahon, Timothy M.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including external recycle loop

422232, 422234, 423 53, 423 59, 423462, F28D 700

Patent

active

053286685

ABSTRACT:
Semiconductor grade tungsten hexafluoride (WF.sub.6) is produced by reacting tungsten metal with a recirculating flow of gaseous WF.sub.6 containing a small concentration of fluorine in a heated reactor. The high purity WF.sub.6 produced is useful for deposition of tungsten metallization in fabricating VLSI integrated circuitry.

REFERENCES:
patent: 2926074 (1960-02-01), Berger
patent: 2929690 (1960-03-01), Bennet
patent: 3981684 (1976-09-01), Mavrovic
patent: 4404180 (1983-09-01), Drum et al.
patent: 4788042 (1988-11-01), Marsh et al.
Perry et al., "Chemical Eng. Handbook, 5th Ed.," pp. 23-56, 1973.

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