Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
Patent
1995-09-12
1998-01-27
Nguyen, Ngoc-Yen
Chemistry of inorganic compounds
Silicon or compound thereof
Halogen containing
423342, C01B 3308
Patent
active
057119252
ABSTRACT:
Highly pure disilicon hexafluoride is synthesized by a process in which a suspension of a fluorination agent is made by dispersing this fluorination agent in an oxybenzene compound as a solvent and disilicon hexachloride is dripped in the suspension to be caused to react with the fluorination agent in nitrogen gas flows under atmospheric pressure, the oxybenzene being expressed by a following formula: ##STR1## (where each of R.sub.1 and R.sub.2 is an alkyl group alternatively having one or more substituents; carbon numbers summed up by R.sub.1 and R.sub.2 are equal to at least 2; and m.gtoreq.1 and n.gtoreq.0).
REFERENCES:
Weast, "Handbook of Chemistry & Physics", 52nd edition, 1971 (no month), pp. C-162.
Araki Hiroshi
Noda Tetsuiji
Suzuki Hiroshi
National Research Institute for Metals
Nguyen Ngoc-Yen
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