Synthesis of phosphorus-doped diamond

Details Synthesis of phosphorus-doped diamond Synthesis of phosphorus-doped diamond

1997-01-31

1999-10-05

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Forming from vapor or gaseous state

With decomposition of a precursor

117103, 117929, 423446, 427249, C30B 2516

Patent

active

059617179

ABSTRACT:
A synthesis of phosphorus-doped diamond by a microwave plasma method using a volatile hydrocarbon and hydrogen mixed therewith, as a reaction gas, wherein phosphorus is used as a dopant, and hydrogen bonded to the phosphorus is dissociated so that the phosphorus is introduced into diamond as an impurity without being bonded to hydrogen.

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patent: 5474816 (1995-12-01), Falabella
Database WPI, Derwent Publications, AN-92-335378/41, JP-A-4-238 895, Aug. 26, 1992.

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