Synthesis of metal oxide thin films

Coating processes – Heat decomposition of applied coating or base material

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427387, 4274072, 427409, 525475, 528485, B05D 302

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053524853

ABSTRACT:
Iron and titanium oxide thin films are deposited onto functionalized self-assembled monolayers (SAMs) which are bonded to silicon or glass substrates. The resulting oxide thin films have ordered, uniform densely packed crystalline structures.

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