Synchronized voltage contrast display analysis system

Details Synchronized voltage contrast display analysis system Synchronized voltage contrast display analysis system

1980-08-22

1982-11-09

Moore, David K.

Electricity: measuring and testing

Plural, automatically sequential tests

250311, 356394, G01R 1512

Patent

active

043587321

ABSTRACT:
An apparatus and method for comparing internal voltage potentials of first and second operating electronic components such as large scale integrated circuits (LSI's) in which voltage differentials are visually identified via an appropriate display means. More particularly, in a first embodiment of the invention a first and second scanning electron microscope (SEM) are configured to scan a first and second operating electronic component respectively. The scan pattern of the second SEM is synchronized to that of the first SEM so that both simultaneously scan corresponding portions of the two operating electronic components. Video signals from each SEM corresponding to secondary electron signals generated as a result of a primary electron beam intersecting each operating electronic component in accordance with a predetermined scan pattern are provided to a video mixer and color encoder. Each video signal is encoded in accordance with a different primary color, a composite signal thereof being provided to a color TV monitor. If corresponding portions of the two video signals have the same voltage potential, one color will appear on the TV monitor. If they are different, then other colors will appear, the exact color being related to the voltage differential and which of the two operating electronic component portions has the higher voltage. Thus, an operator can immediately identify whether the two operating components are performing in a similar manner, and if not, can determine by noting the color shift at what points within the operating electronic components non-identical operation is occurring. If one component is a master component and is known to be operating correctly, then a failure point within a test component can be isolated and the cause of failure investigated.

REFERENCES:
patent: 3868508 (1975-02-01), Lloyd
patent: 4041311 (1977-08-01), Martin
Balk, L. J. et al., "Quantitative Voltage Contrast at High Frequencies in the SEM", Scanning Electron Microscopy, 1976 (Part IV) pp. 615-624.

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