Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to nonconductive state
Reexamination Certificate
2008-07-08
2008-07-08
Heinrich, Samuel M (Department: 1793)
Semiconductor device manufacturing: process
Making device array and selectively interconnecting
Using structure alterable to nonconductive state
C438S940000, C219S121690
Reexamination Certificate
active
07396706
ABSTRACT:
A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
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English Abstract and Purported English Translation of Japanese Publication No. 63-005891.
Harris Richard
Jordens William J.
Sun Lei
Sun Yunlong
Electro Scientific Industries Inc.
Heinrich Samuel M
Stoel Rives LLP
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