Symmetrical CVD coater with lower upstream exhaust toe

Details Symmetrical CVD coater with lower upstream exhaust toe Symmetrical CVD coater with lower upstream exhaust toe

1998-12-29

2000-08-15

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Running length work

C23C 1600

Patent

active

061030155

ABSTRACT:
An apparatus and method for coating a surface of a sheet of glass by deposition of a coating material on the surface as the sheet is conveyed past the apparatus. The apparatus consists of a supply line for supplying a gaseous precursor mixture. The precursor mixture is applied to the surface of a sheet of glass through a chamber. The chamber includes an inlet connected to the supply line and an outlet adjacent the sheet of glass.
The apparatus also includes an upstream exhaust tower including a passageway for exhausting unreacted portions of the gaseous precursor mixture and an upstream exhaust toe positioned a specific height above the glass surface.
Lastly, the apparatus includes a downstream exhaust tower including a passageway for exhausting unreacted portions of the gaseous precursor mixture and a downstream exhaust toe positioned a specific height above the glass surface which is greater than the height at which said upstream exhaust toe is positioned. The distance between the outlet of said chamber and the passageway in said upstream exhaust tower is approximately equal to the distance between the outlet of said chamber and the passageway in said downstream exhaust tower.

REFERENCES:
patent: 3888649 (1975-06-01), Simhan
patent: 4446815 (1984-05-01), Kalbskopf et al.
patent: 4504526 (1985-03-01), Hofer et al.
patent: 4584206 (1986-04-01), Sleighter
patent: 4928627 (1990-05-01), Lindner
patent: 4933211 (1990-06-01), Sauvinet et al.
patent: 5089039 (1992-02-01), Terneu et al.
patent: 5122394 (1992-06-01), Linder
patent: 5487784 (1996-01-01), Ellis, Jr.
patent: 5863337 (1999-01-01), Neuman et al.

Affiliated with

Also associated with

Rating

Symmetrical CVD coater with lower upstream exhaust toe does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Symmetrical CVD coater with lower upstream exhaust toe, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Symmetrical CVD coater with lower upstream exhaust toe will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2002430