Switched electron beam source employing a common photo-emitter c

Details Switched electron beam source employing a common photo-emitter c Switched electron beam source employing a common photo-emitter c

1990-02-20

1991-08-13

Berman, Jack I.

Radiant energy

Fluent material containment, support or transfer means

With irradiating source or radiating fluent material

2504922, H01J 37073, H01J 3730

Patent

active

050398628

ABSTRACT:
A light switched electron beam source employing a common photo-emitter cathode and at least two light emitting sources of monochromatic light, such as laser diodes, light emitting diodes and the like. A light optical collimating and aperture sub-system transmits the light images from the two or more light emitting sources onto a prism or other optical element for diverting the path of the light images onto a common path. The common photo-emitting cathode is positioned in the common path for selective excitation by the respective light emitting sources. An electron optical subsystem is coupled to the output from the common photo-emitter cathode for collimating and further sharpening the electron beam pattern and for projecting it upon a target plane which may comprise an integrated circuit structure upon which patterns are to be written.

REFERENCES:
patent: 4460831 (1984-07-01), Oettinger et al.
patent: 4820927 (1984-04-01), Langner et al.

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