Switchable capacitor and method of making the same

Details Switchable capacitor and method of making the same Switchable capacitor and method of making the same

2006-02-21

2006-02-21

Nelms, David (Department: 2818)

Wave transmission lines and networks

Long line elements and components

Switch

C257S415000, C257S418000, C257S532000, C333S101000, C333S105000

Reexamination Certificate

active

07002439

ABSTRACT:
A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

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