Wave transmission lines and networks – Long line elements and components – Switch
Reexamination Certificate
2006-02-21
2006-02-21
Nelms, David (Department: 2818)
Wave transmission lines and networks
Long line elements and components
Switch
C257S415000, C257S418000, C257S532000, C333S101000, C333S105000
Reexamination Certificate
active
07002439
ABSTRACT:
A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.
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De Raedt Walter
Jansen Henri
Rottenberg Xavier
Tilmans Hendrikus
Interuniversitair Microelektronica Centrum (IMEC)
Knobbe Martens Olson & Bear LLP
Nguyen Dao H.
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