Switch valve device

Details Switch valve device Switch valve device

2006-01-06

2009-02-03

Rivell, John (Department: 3753)

Fluid handling

Systems

Supply and exhaust

C137S596200, C137S596150, C137S884000

Reexamination Certificate

active

07484527

ABSTRACT:
The present invention relates to a switching valve device used for vacuum suction of a member such as a semiconductor chip, and the object thereof is to break a vacuum rapidly and smoothly. The switching valve device includes a vacuum suction switching valve function for vacuum suction, a vacuum break switching valve function for vacuum break, and an open-to-atmosphere switching valve function which in conjunction with an operation of the vacuum suction switching valve function, opens a passage to the atmosphere side when the vacuum suction switching valve function is off and closes the passage to the atmosphere side when the vacuum suction switching valve function is on. The vacuum suction switching valve function, the vacuum break switching valve function, and the open-to-atmosphere switching valve function are integrally incorporated into a body portion.

REFERENCES:
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patent: 6202672 (2001-03-01), Ellis et al.
patent: 6427721 (2002-08-01), Zenker et al.
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patent: 2000-227169 (2000-08-01), None
patent: 2001-030189 (2001-02-01), None
patent: 2002-079483 (2002-03-01), None
patent: 2002-307356 (2002-10-01), None
patent: WO 2005005109 (2005-01-01), None

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