Switch structures

Electricity: circuit makers and breakers – Electrostrictive or electrostatic

Reexamination Certificate

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C335S078000

Reexamination Certificate

active

07928333

ABSTRACT:
A device, such as a switch structure, is provided, the device including a contact and a conductive element. The conductive element can be configured to be selectively moveable between a non-contacting position, in which the conductive element is separated from the contact (in some cases by a distance less than or equal to about 4 μm, and in others by less than or equal to about 1 μm), and a contacting position, in which the conductive element contacts and establishes electrical communication with the contact. When the conductive element is disposed in the non-contacting position, the contact and the conductive element can be configured to support an electric field therebetween with a magnitude of greater than 320 V μm−1and/or a potential difference of about 330 V or more.

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Slade et al., “Electrical Breakdown in Atmospheric Air Between Closely Spaced (0.2 μm-40 μm) Electrical Contacts”, IEEE Transactions on Components and Packaging Technologies, vol. 25, No. 3, pp. 390-396, Sep. 2002.
Majumder et al., “Adhesion and Contact Resistance in an Electrostatic MEMS Microswitch”, Micro Electro Mechanical Systems, 18th IEEE International Conference, pp. 215-218, Jan. 30-Feb. 3, 2005.

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