Suspension fabricated from silicon

Dynamic magnetic information storage or retrieval – Record transport with head stationary during transducing – Drum record

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G11B 548

Patent

active

058962468

ABSTRACT:
An apparatus comprising a magnetic head suspension assembly (10) comprised of a rectangular portion (12), load beam (14) and flexure (16) fabricated from a silicon structure using the etching techniques of the integrated circuit fabrication industry. The magnetic head suspension assembly (10) has electrical leads (23) to a slider, a pre-amp circuit (25) and a microactuator (27) fabricated directly thereon. A system of providing a loading force passing to slider (50) comprises either a tapered base plate (40) adapted to be held by a horizontally oriented actuator arm or an actuator arm (60) having at least one angled receiving surface (62,64) for attachment to said suspension assembly. The method of forming a magnetic head suspension assembly (10) from an etched silicon structure comprising a cutting step comprising cutting the silicon structure into the silhouette shape of a magnetic head suspension assembly, having a rectangular portion (12), a load beam (14) and a flexure (16), the flexure is cut in a shape such that finger members (18), slider bond tongue (19) and dimple tongue (20) appear thereon. Subsequent to the cutting step, photo-etching regions of the silicon structure reduces thickness of the silicon structure in certain regions. The photo-etching leaves a remaining non-etched small plateau area which is adapted to act as a point or dimple for an attached slider to gimbal about.

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