Chemistry: molecular biology and microbiology – Measuring or testing process involving enzymes or... – Involving nucleic acid
Reexamination Certificate
2007-10-16
2007-10-16
Forman, B J (Department: 1634)
Chemistry: molecular biology and microbiology
Measuring or testing process involving enzymes or...
Involving nucleic acid
C435S283100, C435S287200, C435S287300, C435S288500, C422S068100, C536S023100
Reexamination Certificate
active
10669883
ABSTRACT:
An apparatus for detecting an analyte in solution that has a suspended beam containing at least one microfluidic channel containing a capture ligand that bonds to or reacts with an analyte. The apparatus also includes at least one detector for measuring a change in the beam upon binding or reaction of the analyte. A method of making the suspended microfluidic channels is disclosed, as well as, a method of integrating the microfluidic device with conventional microfluidics having larger sample fluid channels.
REFERENCES:
patent: 4896966 (1990-01-01), Boisseau et al.
patent: 5742377 (1998-04-01), Minne et al.
patent: 5883705 (1999-03-01), Minne et al.
patent: 5982534 (1999-11-01), Pinkel et al.
patent: 6002131 (1999-12-01), Manalis et al.
patent: 6075585 (2000-06-01), Minne et al.
patent: 6156216 (2000-12-01), Manalis et al.
patent: 6307202 (2001-10-01), Manalis et al.
patent: 6337479 (2002-01-01), Kley
patent: 6473187 (2002-10-01), Manalis
patent: 6477901 (2002-11-01), Tadigadapa et al.
patent: 6942169 (2005-09-01), Sparks
patent: 2002/0137084 (2002-09-01), Quate et al.
patent: 2003/0000291 (2003-01-01), Kolosov et al.
patent: 2003/0027351 (2003-02-01), Manalis et al.
patent: 2003/0027354 (2003-02-01), Geli
patent: 2003/0073071 (2003-04-01), Fritz et al.
patent: 2004/0038426 (2004-02-01), Manalis
Albrecht, et al., “Frequency Modulation Detection using High-Q Cantilevers for Enhanced Force Microscope Sensitivity”,J. Appl. Phys.69(2): 668-673, 1991.
Anczykowski, et al., “Analysis of the Interaction Mechanisms in Dynamic Mode SFM by Means of Experimental Data and Computer Simulation”,Appl. Phys. A.66: S885-S889, 1998.
Berenschot, et al., “Advanced Sacrificial Poly-Si Technology For Fluidic Systems”,J. Micromech. Microeng.12: 621-624, 2002.
Chen, et al., “Noncovalent Functionalization of Carbon Nanotubes for Highly Specific Electronic Biosensors”,PNAS, 100(9): 4984-4989, 2003.
Cheng, et al., “Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging”,Journal of Microelectromechanical Systems, 9(1): 3-8, 2000.
Cui, et al., “Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species”,Science, 293: 1289-1292, 2001.
deBoer, et al., “Micromachining of Buried Micro Channels in Silicon”,Journal of Microelectromechanical Systems, 9(1): 94-103, 2000.
Duffy, et al., “Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)”,Anal. Chem.70: 4974-4984, 1998.
Duffy, et al., “Rapid Prototyping of Microfluidic Switches in Poly(Dimethyl Siloxane) and Their Actuation by Electro-Osmotic Flow”,J. Micromech. Microeng.9: 211-217, 1999.
Enoksson, et al., “Fluid Density Sensor Based on Resonance Vibration”,Sensors and Actuators A: 327-331, 1995.
Enoksson, et al., “Vibration Modes of a Resonant Silicon Tube Density Sensor”,Journal of Microelectromechanical Systems, 5(1): 39-44, 1996.
Fritz, et al., “Electronic Detection of DNA by its Intrinsic Molecular Charge”,PNAS, 99(22): 14142-14146, 2002.
Fritz, et al., “Translating Biomolecular Recognition into Nanomechanics”,Science, 288: 316-318, 2000.
Garra, et al., “Dry Etching of Polydimethylsiloxane for Microfluidic Systems”,J. Vac. Sci. Technol. A.20(3): 975-982, 2002.
Harendt, et al., “Silicon Fusion Bonding and its Characterization”,J. Micromech. Microeng, 2: 113-116, 1992.
Inoue, et al., “Characteristics of New Dielectric Isolation Wafers for High Voltage Power IC's by Single-Si Poly-Si Direct Bonding (SPSDB) Technique”,IREE Transactions on Electron Devices, 42(2): 356-358, 1995.
Ismail, et al., “Polysilicon and Titanium Disilicide, Polycide Fusion Bonding for 3-D Microdevices Applications”, 86-89, no date provided.
Jackman, et al., Microfluidic Systems with On-Line “UV Detection Fabricated in Photodefinable Epoxy”,J. Micromech. Microeng.11: 263-269, 2001.
Jo, et al., “Three-Dimensional Micro-Channel Fabrication in Plydimethylsiloxane (PDMS) Elastomer”,Journal of Microelectromechanical Systems, 9(1): 76-81, 2000.
Juncker, et al., “Soft and Rigid Two-Level Microfluidic Networks for Patterning Surfaces”,J. Micromech. Microeng.11: 532-541, 2001.
Khoury, et al., “Ultra Rapid Prototyping of Microfluidic Systems Using Liquid Phase Phtopolymerization”,Lab Chip, 2: 50-55, 2002.
Koh, et al., “Investigations in Polysilicon CMP to Apply in Sub-Quarter Micron DRAM Device”,IEEE, 214-217, 1999.
Lang, et al., “Sequential Position Readout from Arrays of Micromechanical Cantilever Sensors”,Appl. Phys. Lett.72(3): 383-385, 1998.
Lange, et al., “CMOS Resonant Beam Gas Sensing System with On-Chip Self Excitation”, 547-552, 2001.
Lukosz, W., “Integrated Optical Chemical and Direct Biochemical Sensors”,Sensors and Actuators, B29: 37-50, 1995.
Maute, et al., “Detection of Volatile Organic Compounds (VOCs) with Polymer-Coated Cantilevers”,Sensors and Actuators B, 58: 505-511, 1999.
Pan, et al., “A Low-Temperature Wafer-Bonding Technique Using Patternable Materials”,J. Micromech. Microorg.12: 611-615, 2002.
Plöβ1, et al., “Wafer Direct Bonding: Tailoring Adhesion Between Brittle Materials”,Materials Science and Engineering, R25: 1-88, 1999.
Rasmussen, et al.,“Fabrication Techniques to Realize CMOS-Compatible Microfluidic Microchannels”,Journal of Microelectromechanical Systems, 10(2): 286-297, 2001.
Raiteri, et al., “Micromechanical Cantilever-Based Biosensors”,Sensors and Actuators B, 79: 115-126, 2001.
Roulet, et al., “Fabrication of Multilayer Systems Combining Microfluidic and Microoptical Elements for Fluorescence Detection”, Journal of Microelectromechanical Systems, 10(4): 482-491, 2001.
Ryu, et al., “Precision Patterning of PDMS Thin Films: A New Fabrication Method and Its Applications”, Defense University Research Initiative in Nanotechnology Program (NAVY CL 2468 ANTIC) the Nano Science and Engineering Center, no date provided.
Savran, et al., “Fabrication and Characterization of a Micromechanical Sensor for Differential Detection of Nanoscale Motions”,Journal of Micromechanical Systems, 11(6): 703-708, 2002.
Schmid, et al., “Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography”,Macromolecules, 33: 3042-3049, 2000.
Sparks, et al., “A Density/Specific Gravity Meter Based on Silicon Microtube Technology”,Proceedings Sensors Expo, 171-176, 2002.
Sparks, et al., “A Microfluidic System for the Measurement of Chemical Concentration and Density”,IEEE, 300-303, 2003.
Stern, et al., “Nanochannel Fabrication for Chemical Sensors”,J. Vac. Sci. Technol. B.15(6): 2887-2891, 1997.
Tamayo, et al., “Chemical Sensors and Biosensors in Liquid Environment Based on Microcantilevers with Amplified Quality Factor”,Ultramicroscopy, 86: 167-173, 2001.
Thundat, et al., “Detection of Mercury Vapor Using Resonating Microcantilevers”,Appl. Phys. Lett, 66(13): 1695-1697, 1995.
Tsau, et al., “Fabrication of Wafer-Level Thermocompression bonds”Journal of Microelectromechanical Systems, 11(6): 641-647, 2002.
Vinod, et al., “A Novel SiC on Insulator Technology Using Wafer Bonding”, International Conference on Solid-State Sensor and Actuators, 653-656, 1997.
Vörös, et al., “Optical Grating Coupler Biosensors”,Biomaterials, 23: 3699-3710, 2002.
Walsh, et al., Photoresist as a Sacrificial Layer by Dissolution in Acetone,IEEE, 114-117,2001.
Wego, et al., “Fluidic Microsystems Based on printed Circuit Board Technology”,J. Micromech. Microeng.11: 528-531, 2001.
Westberg, et al., “A CMOS-Compatible Fluid Density Sensor”,J. Micromech. Microeng.7: 253-255, 1997.
Westberg, et al., “A CMOS-C
Burg Thomas
Manalis Scott
Blasberg Stacy L.
Choate Hall & Stewart LLP
Forman B J
Massachusetts Institute of Technology
Pasternack Sam
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