Susceptors for organometallic vapor-phase epitaxial (OMVPE) meth

Details Susceptors for organometallic vapor-phase epitaxial (OMVPE) meth Susceptors for organometallic vapor-phase epitaxial (OMVPE) meth

1982-09-30

1984-12-18

Smith, John D.

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118728, 118725, 118500, 219 1049R, C23C 1312

Patent

active

044885075

ABSTRACT:
Susceptor formed with a base and with a pedestal made of materials respectively having low and high radio-frequency (r-f) absorptivities. Mercury is carried in a cavity in the base and a semiconductor substrate is carried in a cavity in the pedestal. When an r-f field is applied to the susceptor, the substrate is heated to a higher temperature than the mercury.

REFERENCES:
patent: 1975438 (1934-10-01), Sorrel
patent: 3892940 (1975-07-01), Bloem et al.
patent: 4275282 (1981-06-01), Miller
patent: 4386255 (1983-05-01), Berkman et al.

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