Susceptors

Details Susceptors Susceptors

1999-05-19

2000-12-12

Paik, Sang

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

118725, H05B 368, C23C 1600

Patent

active

061602442

ABSTRACT:
A susceptor comprising a planar heat-conductive layer having a heating surface for heating an object to be heated and a rear surface, a supporting member for supporting the planar heat-conductive layer from a side of the rear surface thereof, first and second heat-choking portions provided between the rear surface of the planar heat-conductive layer and the supporting member in this order, said first heat-choking portion being adapted for restricting a heat flow from the rear surface of the planar heat-conductive layer toward the supporting member, and the second heat-choking portion provided between the first heat-choking portion and the supporting member and adapted for restricting a heat flow from the first heat-choking portion to the supporting member.

REFERENCES:
patent: 3110795 (1963-11-01), Bremer
patent: 3275801 (1966-09-01), Churchill
patent: 5280156 (1994-01-01), Niori et al.
patent: 5566043 (1996-10-01), Kawada et al.
patent: 5591269 (1997-01-01), Arami et al.
patent: 5851298 (1998-12-01), Ishii

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