Susceptor with built-in electrode and manufacturing method...

Details Susceptor with built-in electrode and manufacturing method... Susceptor with built-in electrode and manufacturing method...

2005-03-29

2005-03-29

Wille, Douglas (Department: 2814)

Electric heating

Metal heating

By arc

C219S390000

Reexamination Certificate

active

06872908

ABSTRACT:
There is provided a susceptor with a built-in electrode and a manufacturing method therefor, in which there is no danger of corrosive gas or plasma or the like penetrating to the inside of the substrate, which has excellent corrosion resistance and plasma resistance, in which nonconductivity under high temperatures is improved, and in which leakage current does not occur. A susceptor with a built-in electrode21according to the present invention comprises: a mounting plate22and a support plate23which are formed from aluminum nitride based sintered bodies; an internal electrode24formed from either an aluminum nitride and tungsten composite sintered body or an aluminum nitride and molybdenum composite sintered body, which is formed between the mounting plate22and the support plate23; and power supply terminals26which are provided in the support plate23and are electrically connected to the internal electrode24, and both surfaces of the internal electrode24are coated with a nonconductive material30comprising AlN particles.

REFERENCES:
patent: 6113704 (2000-09-01), Satoh et al.
patent: 6441548 (2002-08-01), Arimoto
patent: 01-138174 (1989-05-01), None
patent: 2001-085505 (2001-03-01), None
patent: 2001-308165 (2001-11-01), None

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