Susceptor for MOCVD reactor

Details Susceptor for MOCVD reactor Susceptor for MOCVD reactor

2006-10-17

2006-10-17

Flynn, Nathan J. (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

Plural light emitting devices

C257S090000, C257S088000, C257S291000, C257S292000, C257S440000, C257S441000, C438S689000

Reexamination Certificate

active

07122844

ABSTRACT:
A susceptor for holding semiconductor wafers in an MOCVD reactor during growth of epitaxial layers on the wafers is disclosed. The susceptor comprises a base structure made of a material having low thermal conductivity at high temperature, and has one or more plate holes to house heat transfer plugs. The plugs are made of a material with high thermal conductivity at high temperatures to transfer heat to the semiconductor wafers. A metalorganic organic chemical vapor deposition reactor is also disclosed utilizing a susceptor according to the present invention.

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