Susceptor for heating semiconductor substrates

Details Susceptor for heating semiconductor substrates Susceptor for heating semiconductor substrates

1977-04-11

1978-07-04

Reynolds, Bruce A.

Electric heating

Metal heating

Of cylinders

118 495, H05B 508

Patent

active

040990419

ABSTRACT:
An integral graphite susceptor of the type comprising a hollow polyhedron, adapted to support a semiconductor substrate on an outer planar surface of a wall thereof, has a recessed cavity adjacent the inner surface of the wall and shaped so that the floor of the cavity is parallel to the outer planar surface. The cavity may comprise an oblong-shaped slot machined into the wall of the susceptor, which is typically a hollow truncated pyramid.

REFERENCES:
patent: 3754110 (1973-08-01), Van Dongen et al.
patent: 3845738 (1974-11-01), Berkman et al.
patent: 3892940 (1975-07-01), Bloem et al.
patent: 3980854 (1976-09-01), Berkman et al.

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