Susceptor for deposition process equipment and method of...

Details Susceptor for deposition process equipment and method of... Susceptor for deposition process equipment and method of...

2004-09-24

2008-08-12

Paik, S. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S724000

Reexamination Certificate

active

07411161

ABSTRACT:
A susceptor for deposition process equipment is provided. The susceptor includes a heater that heats the susceptor. The heater includes a sheath. The sheath surrounds a heating wire and is filled with an insulating ceramic material. An isolation layer is formed opposing ends of the sheath to isolate the ceramic material from the ambient environment. The isolation layer is formed from a lead/glass mixture that blocks moisture in the ambient environment from being absorbed by the insulating material. Input/output terminals are connected to the heating wire. The input/output terminals pass through the isolation layer and are exposed to the ambient environment. Current is supplied to the heating wire through the input/output terminals to heat the heating wire.

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Office Action dated Oct. 27, 2006 for corresponding Chinese Patent Application No. 200410055714.9.
Office Action for corresponding Japanese Patent Application Serial No. 2004-311795, dated Jul. 30, 2007.

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