Susceptor for bearing an object to be processed thereon

Details Susceptor for bearing an object to be processed thereon Susceptor for bearing an object to be processed thereon

1998-06-08

2000-03-28

Tentoni, Leo B.

Coating apparatus

Gas or vapor deposition

Work support

118500, C23C 1600

Patent

active

060426535

ABSTRACT:
A susceptor according to the present invention is set in a process chamber for subjecting an object to a specific process and can bear the object thereon. The susceptor includes a stepped section for defining a recessed bearing region capable of bearing the object therein and positioning the object on the susceptor, and at least one groove formed in the bearing region and used to allow a gas remaining in a gap between the object and that part of the susceptor which includes the stepped section to get out of the bearing region.

REFERENCES:
patent: 5620525 (1997-04-01), van de Ven et al.
patent: 5738751 (1998-04-01), Camerson

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