Susceptor electrode and method for making same

Details Susceptor electrode and method for making same Susceptor electrode and method for making same

1991-01-28

1993-02-16

Paschall, Mark H.

Electric heating

Metal heating

By arc

219119, 21912148, B23K 900

Patent

active

051873478

ABSTRACT:
A composite electrode (10) that is used for conducting a modulated voltage in a plasma reactor. An electrically conductive non-oxidizing surface and an electrically conductive metal surface are electrically and mechanically joined together by threads (12 and 13) to form a composite electrode (10). The composite electrode (10) is used to make contact between a wafer holder and the plasma reactor when the wafer holder is at rest in a chamber of the reactor.

REFERENCES:
patent: 2346088 (1944-04-01), Shobert, II
patent: 3911246 (1975-10-01), Drinkard, Jr.
patent: 4495399 (1985-01-01), Cann
patent: 4710607 (1987-12-01), Wilhelmi et al.

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