Susceptor device

Details Susceptor device Susceptor device

2005-01-04

2005-01-04

Paik, Sang Y. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S724000

Reexamination Certificate

active

06838646

ABSTRACT:
A susceptor device comprises a susceptor base body, a temperature controlling section, an adhesive layer which attaches the susceptor base body and the temperature controlling section unitarily, an O-ring which is disposed near a peripheral section of the adhesive layer, a circular O-ring which is disposed on a bottom surface of the temperature controlling section, an O-ring supporting section which surrounds the temperature controlling section and compresses the O-rings on the temperature controlling section, and pushup screws which push up and fix the O-ring supporting section toward the temperature controlling section. By doing this, it is possible to protect the adhesive layer from an external environment. Also, it is possible to provide a susceptor device having a superior temperature controlling characteristics for the plate sample, operational stability, and durability.

REFERENCES:
patent: 5290381 (1994-03-01), Nozawa et al.
patent: 5567267 (1996-10-01), Kazama et al.
patent: 5851298 (1998-12-01), Ishii
patent: 6084215 (2000-07-01), Furuya et al.
patent: 6538872 (2003-03-01), Wang et al.
patent: 2001313331 (1901-11-01), None
patent: 8162519 (1996-06-01), None
patent: 9045757 (1997-02-01), None
patent: 10032239 (1998-02-01), None
patent: 10270540 (1998-10-01), None
patent: 2002184851 (2002-06-01), None

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