Susceptor connection system and associated apparatus and method

Details Susceptor connection system and associated apparatus and method Susceptor connection system and associated apparatus and method

2005-05-24

2005-05-24

Walberg, Teresa J. (Department: 3742)

Electric heating

Inductive heating

With heat exchange

C219S659000

Reexamination Certificate

active

06897419

ABSTRACT:
A susceptor connection system and an associated apparatus and method are provided. The susceptor connection system includes at least one shoe that can be urged against a peripheral edge portion of the susceptors by a compression device. In this regard, each shoe can urge the edge portions of the susceptors together to achieve electrical contact therebetween, e.g., so that an induced current can flow between the susceptors to heat the susceptors and a workpiece. In addition, each shoe can define a passage for circulating a coolant to cool the edge portions and thereby reduce the oxidation and contact resistance between the susceptors.

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