Susceptor assembly

Details Susceptor assembly Susceptor assembly

1983-07-08

1985-01-29

Envall, Jr., Roy N.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

118730, 118 501, 219354, C23C 1308, H05B 100

Patent

active

044968280

ABSTRACT:
A susceptor for holding substrates during a high temperature vapor deposition process is constructed from separable top, bottom and side plates interlocked to each other in a gravity maintained assembly.

REFERENCES:
patent: 3603284 (1971-09-01), Garnache
patent: 3623712 (1971-11-01), McNeilly
patent: 3637434 (1972-01-01), Nakanuma
patent: 3796182 (1974-03-01), Rosler
patent: 3862397 (1975-01-01), Anderson
patent: 4022939 (1977-05-01), Roth
patent: 4099041 (1978-07-01), Berkman
patent: 4217856 (1980-08-01), Kraus

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