Suscepter and process for production thereof

Details Suscepter and process for production thereof Suscepter and process for production thereof

1995-01-18

1997-09-09

Lewis, Michael

Single-crystal, oriented-crystal, and epitaxy growth processes;

Forming from vapor or gaseous state

With decomposition of a precursor

423445R, 117900, C01B 3100

Patent

active

056656360

ABSTRACT:
A suscepter, which is composed substantially of a vitreous carbon derived from polycarbodiimide resin; and a process for producing a suscepter, which includes molding a polycarbodiimide resin or a composition composed mainly of a polycarbodiimide resin, into a shape of a suscepter and then carbonizing the molded material in vacuum or an inert gas atmosphere.
The suscepter is free from the problems of the prior art, which has no pores on the surface and generates no impurity and which causes no cracking when used at high temperatures.

REFERENCES:
patent: 5093214 (1992-03-01), Saito et al.

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