Surface wave launchers to produce plasma columns and means for p

Details Surface wave launchers to produce plasma columns and means for p Surface wave launchers to produce plasma columns and means for p

1988-08-08

1990-03-06

Groody, James J.

Electric lamp and discharge devices: systems

Combined load device or load device temperature modifying...

Distributed parameter resonator-type magnetron

31511121, 315248, 31323131, 313634, H01J 1104

Patent

active

049068989

ABSTRACT:
The present invention relates to a device for generating plasma (ionizing gas) by a propagating surface wave. The device comprises a wave launching structure mounted on a plasma vessel and connected to an impedance matching network. The latter comprises a coupler and a tuner which is either formed by a section of a transmission line or is of the lumped circuitry type. The launching structure may either generate an azimuthally symmetric or a non symmetric propagating wave. This invention also relates to a method and a device for shaping plasma which comprises a plasma vessel receiving a surface wave generator and having a serviceable portion of a size and/or shape substantially different from the shape and/or size of the portion of the plasma vessel receiving the wave generator.

REFERENCES:
patent: 3641389 (1972-12-01), Leidigh
patent: 3705319 (1972-12-01), Goldie et al.
patent: 4049940 (1977-09-01), Moisan et al.
patent: 4792725 (1988-12-01), Levy et al.

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