Surface voltmeter and surface voltage measurement method

Details Surface voltmeter and surface voltage measurement method Surface voltmeter and surface voltage measurement method

2007-03-09

2009-10-06

Nguyen, Vincent Q (Department: 2831)

Electricity: measuring and testing

Electrostatic field

Using modulation-type electrometer

C324S661000, C324S750010

Reexamination Certificate

active

07598746

ABSTRACT:
A surface voltmeter has a stage having a conductive surface, a vibrating electrode, a vibration part, and an elevation mechanism. While vibrating the vibrating electrode, displacement current from the conductive surface is acquired. A control part controls electrode voltage so that the displacement current becomes a value specified by a computer, and acquires a relationship between the displacement current and the electrode voltage while changing the displacement current. Acquisition of the relationship is performed a plurality of times while changing distance between the vibrating electrode and an object, the electrode voltage which is independent from the distance between the vibrating electrode and the object is obtained as reference voltage, and surface voltage on the object is obtained on the basis of the reference voltage. This makes it possible to remove effects of stray capacitances between the vibrating electrode and other constituent elements therearound from measurement, and easily perform higher-precision measurement.

REFERENCES:
patent: 5742172 (1998-04-01), Yasutake
patent: 6014028 (2000-01-01), Ohashi et al.
patent: 2006/0267622 (2006-11-01), Lagowski et al.
patent: 8-153762 (1996-06-01), None
patent: 9-211046 (1997-08-01), None

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