Surface type acceleration sensor

Details Surface type acceleration sensor Surface type acceleration sensor

1995-10-03

1997-08-19

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

257418, G01P 1508

Patent

active

056591381

ABSTRACT:
A surface type acceleration sensor includes a p-type single crystal silicon base plate, a cantilever functioning as a cantilever structure portion, and a plurality of strain gauges. The cantilever is disposed in a recess portion formed on the front face of the p-type single crystal silicon base plate so that the cantilever can be displaced in the upward and downward direction. The cantilever includes an epitaxial growth layer principally made of n-type single crystal silicon. The strain gauge is made of p-type silicon and formed on an upper face of the base end portion of the cantilever.

REFERENCES:
patent: 3893228 (1975-07-01), George
patent: 4131524 (1978-12-01), Gieles
patent: 4737473 (1988-04-01), Wilner

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