Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2002-12-28
2009-08-11
Hassanzadeh, Parviz (Department: 1792)
Coating apparatus
Gas or vapor deposition
Work support
Reexamination Certificate
active
07572339
ABSTRACT:
Disclosed are a surface treatment system that includes a deposition chamber (100) for forming a deposition layer at a surface of an object of surface treatment (900); a carrier (910) for carrying the object of surface treatment (900) by mounting thereon, and a power applying unit (230) for forming a deposition reaction by applying a power to the object in the deposition chamber (100), wherein the power applying unit (230) includes a fixed power applying unit (220) installed in the deposition chamber (100) and connected to an external power source (210); and a movable power applying unit (230) installed at the carrier (910) for being electrically connected to the fixed power applying unit (220) movably as the carrier on which the object of surface treatment (900) is mounted goes into the deposition chamber and thereby applying a power to the object of surface treatment mounted on the carrier by contacting thereto.
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Cho Cheon-Soo
Ha Samchul
Jun Hyun-Woo
Lee Hyun-Wook
Youn Dong-Sik
Birch & Stewart Kolasch & Birch, LLP
Gramaglia Maureen
Hassanzadeh Parviz
LG Electronics Inc.
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