Surface treatment process

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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Details

20419231, 427 39, B05D 306

Patent

active

046346007

ABSTRACT:
A substrate is treated for forming a thin film on the surface of the substrate to obtain a hard layer adhering to the substrate surface. For this purpose the substrate is placed in a metal vapor atmosphere and simultaneously bombarded by metal or nonmetal ions which are implanted into the substrate while the metal vapor atmosphere is also being ionized.

REFERENCES:
patent: 3915757 (1975-10-01), Engel
patent: 4137370 (1979-01-01), Fujishiro et al.
patent: 4181590 (1980-01-01), Fujishiro et al.
patent: 4351695 (1982-09-01), Hieber et al.
patent: 4520040 (1985-05-01), Cordts
patent: 4520268 (1985-05-01), Xu

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