Surface treatment of semiconductor materials

Details Surface treatment of semiconductor materials Surface treatment of semiconductor materials

1980-10-14

1983-05-31

Weisstuch, Aaron

Chemistry: electrical current producing apparatus, product, and

Deferred action type

Responsive to light

2041292, 2041293, 204DIG3, 204 2995, 204290R, 427 74, 427 76, 136260, 136264, 357 30, H01M 636, H01L 3100

Patent

active

043861423

ABSTRACT:
A process for preparing the surface of a metal chalcogenide. The metal chalcogenide is immersed in a suitable electrolyte. The electrolyte is selected such that the metal chalcogenide is relatively stable therein in the dark, but unstable as a photoelectrode under illumination. The metal chalcogenide is connected to another electrode; and the electrode is immersed in the electrolyte. The metal chalcogenide is illuminated to photoetch the chalcogenide thereby improving the surface electronic properties of the semiconductor.
A process for the surface treatment of metal chalcogenides including immersing the metal chalcogenide in an aqueous solution containing Zn and/or Cr ions.

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Hollan, L., et al., "Interpretation of Selective Etching of III-IV Compounds on the Basis of Semiconductor Electrochemistry" Journal of the Electrochemical Society, vol. 26, No. 5, May 1979, pp. 855-859.
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