Surface treatment of polishing cloth

Details Surface treatment of polishing cloth Surface treatment of polishing cloth

1995-02-28

1997-05-06

Morgan, Eileen P.

Abrading

Machine

Rotary tool

451 56, 451271, 451443, B24B 2900

Patent

active

056265093

ABSTRACT:
An apparatus for surface treatment of polishing cloth includes a rotary cloth mounting section on which a polishing cloth is to be attached, and a rotary surface treatment tool made of an inorganic material other than metal and having at least a protrusion with an irregular surface portion on the surface thereof. The surface treatment tool and the cloth mounting section is rotated and a position of a rotation axis of a first rotating unit is different from that of a rotation axis of a second rotating unit. The rotating surface treatment tool is pressed against the cloth mounting section with a predetermined pressure while the surface treatment and cloth mounting sections are rotated.

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patent: 5421768 (1995-06-01), Fujiwara et al.
patent: 5486131 (1996-01-01), Cesna et al.
"Ecologically-Safe Ionized Water Treatment for Wafer Processing", H. Aoki et al., Symposium on VLSI Technology Digest of Technical Papers pp. 107-108, 1994.
"Novel Electrolysis-Ionized-Water Cleaning Technique for the Chemical-Mechanical Polishing (CMP) Process", H. Aoki et al., Symposium on VLSI Technology Digest of Tecnnical Papers pp. 79-80, 1994.

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