Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Patent
1994-09-15
1995-12-19
Pianalto, Bernard
Coating processes
Direct application of electrical, magnetic, wave, or...
Ion plating or implantation
427127, 427130, 427131, 427132, 427249, 427250, 4272557, 427294, 427404, 427531, 427535, 427576, 427577, 427578, B05D 306
Patent
active
054766915
ABSTRACT:
Surface modification of magnetic recording heads using plasma immersion ion implantation and deposition is disclosed. This method may be carried out using a vacuum arc deposition system with a metallic or carbon cathode. By operating a plasma gun in a long-pulse mode and biasing the substrate holder with short pulses of a high negative voltage, direct ion implantation, recoil implantation, and surface deposition are combined to modify the near-surface regions of the head or substrate in processing times which may be less than 5 min. The modified regions are atomically mixed into the substrate. This surface modification improves the surface smoothness and hardness and enhances the tribological characteristics under conditions of contact-start-stop and continuous sliding. These results are obtained while maintaining original tolerances.
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A. Anders et al., "Joining of Metal Films to Carbon-Carbon Composite Material by Metal Plasma Immersion Ion Implantation," Materials Research Society Symp. Proc. of MRS meeting held Apr. 12-16, 1993, vol. 314, Aug. 1993, pp. 205-208.
I. G. Brown, "Plasma Synthesis of Thin Films and Multilayers With Tailored Atomic Mixing," Plasma Synthesis and Processing of Materials, Proceeding of a symposium held Feb. 22-25, 1993, pp. 37-46, 1993.
S. Anders et al., "Macroparticle-free thin films produced by an efficient vacuum arc deposition technique," Journal of Applied Physics, vol. 74, No. 6, 15 Sep. 1993, pp. 4239-4241.
I. G. Brown et al., "Novel metal ion surface modification technique," Applied Physics Letters, vol. 58, No. 13, 1 Apr. 1991, pp. 1392-1394.
A. Anders et al., "Low energy ion implantation/deposition as a film synthesis and bonding tool," Mat. Res. Soc. Symp. Proc., vol. 316, 1994, pp. 833-844, presented Nov. 29-Dec. 3 1993.
I. G. Brown et al., "Plasma synthesis of metallic and composite thin films with atomically mixed substrate bonding," Nuclear Instruments and Methods in Physics Research, vol. B80/81, 1993, pp. 1281-1287.
Anders Andre
Anders Simone
Bhatia Singh C.
Brown Ian G.
Komvopoulos Kyriakos
International Business Machines Inc.
Pianalto Bernard
Regents of the University of California
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