Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1998-06-26
2000-03-07
Breneman, Bruce
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
451302, C23F 102
Patent
active
06033522&
ABSTRACT:
In a surface treatment apparatus for a rotating disc 10, the outer peripheries of the disc 10 are brought into contact with a pair of positioning rollers 13, 14 to position the disk 10 at the predetermined position. A first treatment roller 17 brought into contact with one of the surfaces of the disc 10 and a second treatment roller 18 brought into contact with the other surface of the disc 10 are arranged at both side of the disk 10, and the rollers 17, 18 are drive to move to come close to and away from each other. When the disk 10 is held between the rollers 17, 18, the frictional force of the rollers relative to the disc 10 is differentiated between an end and the opposite end of each of the rollers, thereby, the rotary motions of the rollers 17, 18 are transformed into a rotary motion of the disc 10 to treat the surfaces of the rotating disc.
REFERENCES:
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patent: 5486134 (1996-01-01), Jones et al.
patent: 5490809 (1996-02-01), Jones et al.
patent: 5785585 (1998-07-01), Manfredi et al.
patent: 5798164 (1998-08-01), Weiss et al.
patent: 5820446 (1998-10-01), Lu
Iwata Tetsuya
Nakazawa Nobuo
Breneman Bruce
Powell Alva C
System Seiko Co., Ltd.
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