Surface treatment method

Details Surface treatment method Surface treatment method

2007-03-19

2010-10-19

Morgan, Eileen P. (Department: 3723)

Abrading

Abrading process

Combined abrading

C451S041000, C451S054000, C451S059000, C451S066000, C451S303000, C451S307000

Reexamination Certificate

active

07815492

ABSTRACT:
A surface treatment method that enables a surface of an electrostatic chuck to be smoothed, so as to improve the efficiency of heat transfer between the surface of the electrostatic chuck and a substrate. The electrostatic chuck is provided in an upper portion of a susceptor provided in a chamber of a substrate processing apparatus. In the surface treatment of the electrostatic chuck, a sprayed coating film is formed on the surface of the electrostatic chuck, next the surface of the electrostatic chuck is ground by bringing into contact therewith a grindstone, then the surface of the electrostatic chuck is ground flat by bringing into contact therewith a lapping plate onto a surface of which is sprayed a suspension, and then the surface of the electrostatic chuck is ground smooth by bringing into contact therewith a tape of a tape lapping apparatus.

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patent: 2003/0190865 (2003-10-01), Somekh
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patent: 58153220 (1983-09-01), None
patent: 5-190654 (1993-07-01), None

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