Semiconductor device manufacturing: process – Including control responsive to sensed condition – Electrical characteristic sensed
Reexamination Certificate
2006-01-31
2006-01-31
Goudreau, George A. (Department: 1763)
Semiconductor device manufacturing: process
Including control responsive to sensed condition
Electrical characteristic sensed
C438S459000, C438S663000, C438S690000, C438S692000, C438S974000, C216S072000, C216S095000
Reexamination Certificate
active
06991944
ABSTRACT:
This invention relates to a process for treatment of a multi-layer wafer with materials having differential thermal characteristics, the process comprising a high temperature heat treatment step that can generate secondary defects, characterised in that this process includes a wafer surface preparation step before the high temperature heat treatment step.
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Blondeau Beryl
Fournel Franck
Lagahe-Blanchard Christelle
Moriceau Hubert
Rayssac Olivier
Commissariat à l'Energie Atomique (CEA)
Goudreau George A.
S.O.I.Tec Silicon on Insulation Technologies S.A.
Winston & Strawn LLP
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