Surface treatment device

Details Surface treatment device Surface treatment device

1979-07-26

1981-08-11

McIntosh, John P.

Coating apparatus

With heat exchange, drying, or non-coating gas or vapor...

118425, 118426, 118428, 118429, 134 66, 134165, B05C 304, B05C 310

Patent

active

042828252

ABSTRACT:
A surface treatment device capable of carrying out the surface treatment such as washing or etching of plate-like articles such as semiconductor wafers maintaining high degree of reliability, wherein a surface treating liquid is introduced into a ring-like or a conduit-like treating vessel. The plate-like articles to be treated are moved by a conveyor on a conveyor path having a surface in parallel with the surfaces of the plate-like articles against the stream of the treating liquid in a piece-by-piece manner, so that the surfaces of the plate-like articles are treated, whereby the surfaces of the semiconductor wafers can be desirably treated prior to manufacturing the semiconductor products.

REFERENCES:
patent: 3494326 (1970-02-01), Upton
patent: 3559554 (1971-02-01), Schmidt
patent: 3882525 (1975-05-01), Zwettler
patent: 4032943 (1977-06-01), Zwettler
patent: 4098923 (1978-07-01), Alberti et al.

Affiliated with

Also associated with

Rating

Surface treatment device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface treatment device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface treatment device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1021496