Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Reexamination Certificate
2004-08-10
2008-10-14
Carrillo, Sharidan (Department: 1792)
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
C134S009000, C134S015000, C134S025400, C134S025500, C134S032000, C134S033000, C134S042000, C134S902000, C015S077000, C015S088300
Reexamination Certificate
active
07435302
ABSTRACT:
A cleaning apparatus according to the present invention is provided with a brush drive mechanism which brings a brush being rotating closer to a substrate, measures electrical potentials generated on a plurality of conductor patterns formed on the substrate, by a contact and separation with/from tips of scrub materials of the brush being rotating, and controls a positioning of the brush by use of the measurement results. With the process as described above, it is possible to treat uniformly a surface to-be-cleaned for a large-sized substrate, with the cleaning brush. Consequently, it is possible to form a highly qualified transistor for liquid crystal display on the substrate having been cleaned, with enhancing yield.
REFERENCES:
patent: 2962147 (1960-11-01), Klyce
patent: 10-135167 (1998-05-01), None
Asaka Shoji
Kawanago Hiroshi
Ohroku Noriyuki
Takahara Yoichi
Takahashi Tomoaki
Antonelli, Terry Stout & Kraus, LLP.
Carrillo Sharidan
Hitachi Displays Ltd.
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